Sensing Architect Metrology

Introduction

ASML is extending its strong position in the field of metrology for the semiconductor market. Located in ASML’s D&E cluster in Business Line Applications, we are a steadily growing department of experts working on a new metrology concept.

Job Mission

In this role you will be responsible to define the sensing architecture required for our new metrology tool, with primary focus on optical sensing.

Job Description

ASML customers’ lithography roadmaps push both lithography and metrology to increasingly challenging requirements. With upcoming semiconductor technology nodes, the industry has an urgent need for 3D profile metrology and device pitch overlay metrology.
This position is directed towards research and development of new concepts and applications in wafer metrology. More specifically, the intended work will focus on the definition of the optical sensing path of a new metrology demonstrator tool currently under development in our department. In this role, the sensing architect will focus on the physics and engineering of the optical path and will have a close collaboration with the calibration architect, which will focus more on the mathematical algorithms required to calibrate the system connecting the whole measurement chain from source to the inference algorithms to extract the relevant parameters of interest.

Education

Considering the broad scope of the role, the ideal candidate has experience in optics, optical sensing and architecture of metrology tools.

The candidate must have a PhD or MSc degree in Physics or EE.

Experience

For this architect role, the ideal candidate has preferably more than 8 years of product R&D experience in a complex high-tech environment, where he/she/they has operated as metrology architect in the field of optical sensing. Strong understanding of optical concepts and experimental realities must be accompanied by demonstrated capability to interact with multiple teams, sometimes in different Departments. Since a close collaboration with the calibration architect will be needed, understanding and experience in calibration procedures will be needed too. The candidate should have a working knowledge of the imperfections common in experimental systems, and practical intuition about how to translate from raw detector signals/images to desired properties. Besides that, experience with architecture of metrology systems and experience with feasibility studies and development is required.

Personal Skills:

We are looking for a person with the following skillset:

• Team-player, who prefers to work in a close collaboration mode

• Convincing personality to propagate his/her/their technology proposals within the team and within the ASML organization

• Commitment to team and company

• High personal ambition and drive with strong sense of ownership

• Drive to deliver excellent performance

• Communication skills for communication at various levels in the organization

• Solution-oriented mind-set, with ability to choose pragmatic solutions in the presence of uncertainty/a very open solution space.

Context of the position

This project will be carried out in the D&E department in business line Applications. The project is further part of a collaboration with other Departments within the ASML organization.

Other information

Keywords: Fourier optics; optical architecture; light sources, optical metrology, optical sensing.

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that Diversity and inclusion is a driving force in the success of our company.

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Work Experience: 10-15 years

Travel: No

Education Level: Master, PhD

Employment Type: FULL_TIME

Team: Design Engineering and Architecture

Technical Field: Optical Sensing